Yuya Hirai

Person

Koka-city, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Hydrogen supply device, and ion beam irradiation apparatus equipped...
- Patent number 12,340,974
- Issue date Jun 24, 2025
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer clamping method and semiconductor manufacturing apparatus
- Patent number 12,272,588
- Issue date Apr 8, 2025
- NISSIN ION EQUIPMENT CO., LTD.
- Takayuki Murayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and cleaning method thereof
- Patent number 10,971,339
- Issue date Apr 6, 2021
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 10,600,608
- Issue date Mar 24, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu Adachi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER CLAMPING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250029865
- Publication date Jan 23, 2025
- NISSIN ION EQUIPMENT CO., LTD.
- Takayuki MURAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20240404787
- Publication date Dec 5, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SOURCE
- Publication number 20240331980
- Publication date Oct 3, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Honoka WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM EXTRACTION ELECTRODE, ION SOURCE AND EXTRACTION ELECTRODE...
- Publication number 20240290576
- Publication date Aug 29, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER, ION SOURCE, ION BEAM IRRADIATION APPARATUS, AND AN OPERA...
- Publication number 20240186101
- Publication date Jun 6, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE AND OPERATING METHOD THEREOF
- Publication number 20240038499
- Publication date Feb 1, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuta IWANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM IRRADIATION APPARATUS AND METHOD
- Publication number 20240030004
- Publication date Jan 25, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuta IWANAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN SUPPLY DEVICE, AND ION BEAM IRRADIATION APPARATUS EQUIPPED...
- Publication number 20230008178
- Publication date Jan 12, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE AND CLEANING METHOD THEREOF
- Publication number 20200279720
- Publication date Sep 3, 2020
- NISSIN ION EQUIPMENT CO., LTD.
- Masakazu ADACHI
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Hydrogen supply device, and ion beam irradiation apparatus equipped...

Wafer clamping method and semiconductor manufacturing apparatus

Ion source and cleaning method thereof

Ion source

Patents Applicationslast 30 patents

WAFER CLAMPING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS

ION IMPLANTER AND ION IMPLANTATION METHOD

PLASMA SOURCE

ION BEAM EXTRACTION ELECTRODE, ION SOURCE AND EXTRACTION ELECTRODE...

VAPORIZER, ION SOURCE, ION BEAM IRRADIATION APPARATUS, AND AN OPERA...

ION SOURCE AND OPERATING METHOD THEREOF

ION BEAM IRRADIATION APPARATUS AND METHOD

HYDROGEN SUPPLY DEVICE, AND ION BEAM IRRADIATION APPARATUS EQUIPPED...

ION SOURCE AND CLEANING METHOD THEREOF