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Yuya KAMEI
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Koshi City, JP
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last 30 patents
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Patent Grant
Developing method and substrate treatment system
Patent number
12,339,593
Issue date
Jun 24, 2025
Tokyo Electron Limited
Yuya Kamei
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20240248413
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Takeshi SHIMOAOKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
DEVELOPING METHOD AND SUBSTRATE TREATMENT SYSTEM
Publication number
20220197159
Publication date
Jun 23, 2022
TOKYO ELECTRON LIMITED
Yuya KAMEI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY