Yuya MATSUBARA

Person

Yokkaichi Mie, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing semiconductor device
- Patent number 11,935,750
- Issue date Mar 19, 2024
- Kioxia Corporation
- Kei Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and manufacturing method of s...
- Patent number 11,859,286
- Issue date Jan 2, 2024
- Kioxia Corporation
- Yuya Matsubara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck apparatus and semiconductor manufacturing appar...
- Patent number 11,823,872
- Issue date Nov 21, 2023
- Kioxia Corporation
- Yuya Matsubara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas recovering apparatus, semiconductor manufacturing system, and g...
- Patent number 11,766,635
- Issue date Sep 26, 2023
- Kioxia Corporation
- Yuya Matsubara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate processing apparatus and method of producing semiconducto...
- Patent number 11,393,675
- Issue date Jul 19, 2022
- Kioxia Corporation
- Yuya Matsubara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device having a film with la...
- Patent number 11,373,865
- Issue date Jun 28, 2022
- Kioxia Corporation
- Takehiro Kondoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 11,367,624
- Issue date Jun 21, 2022
- Kioxia Corporation
- Junichi Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask member and method for producing semiconductor device
- Patent number 11,177,135
- Issue date Nov 16, 2021
- TOSHIBA MEMORY CORPORATION
- Yuya Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,872,782
- Issue date Dec 22, 2020
- TOSHIBA MEMORY CORPORATION
- Yuya Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable resistance element and memory device
- Patent number 10,164,180
- Issue date Dec 25, 2018
- TOSHIBA MEMORY CORPORATION
- Hiromichi Kuriyama
- G11 - INFORMATION STORAGE
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 9,754,793
- Issue date Sep 5, 2017
- TOSHIBA MEMORY CORPORATION
- Shinichi Nakao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PIPING, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUF...
- Publication number 20240068094
- Publication date Feb 29, 2024
- KIOXIA Corporation
- Yuya MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PRODUCING SEMICONDUCTO...
- Publication number 20220319842
- Publication date Oct 6, 2022
- KIOXIA Corporation
- Yuya MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS AND SEMICONDUCTOR MANUFACTURING APPAR...
- Publication number 20220108877
- Publication date Apr 7, 2022
- Kioxia Corporation
- Yuya MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS RECOVERING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, AND G...
- Publication number 20220072473
- Publication date Mar 10, 2022
- KIOXIA Corporation
- Yuya MATSUBARA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
- Publication number 20210335610
- Publication date Oct 28, 2021
- KIOXIA Corporation
- Kei WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210287903
- Publication date Sep 16, 2021
- Kioxia Corporation
- Takehiro KONDOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF S...
- Publication number 20210277520
- Publication date Sep 9, 2021
- KIOXIA Corporation
- Yuya MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20210066090
- Publication date Mar 4, 2021
- KIOXIA Corporation
- Junichi HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200294811
- Publication date Sep 17, 2020
- Toshiba Memory Corporation
- Yuya MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PRODUCING SEMICONDUCTO...
- Publication number 20200090931
- Publication date Mar 19, 2020
- Toshiba Memory Corporation
- Yuya MATSUBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK MEMBER AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
- Publication number 20200075341
- Publication date Mar 5, 2020
- Toshiba Memory Corporation
- Yuya MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE RESISTANCE ELEMENT AND MEMORY DEVICE
- Publication number 20180145251
- Publication date May 24, 2018
- Toshiba Memory Corporation
- Hiromichi KURIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170092505
- Publication date Mar 30, 2017
- KABUSHIKI KAISHA TOSHIBA
- Shinichi NAKAO
- H01 - BASIC ELECTRIC ELEMENTS

Yuya MATSUBARA

Person

Patents Grantslast 30 patents

Method for producing semiconductor device

Semiconductor manufacturing apparatus and manufacturing method of s...

Electrostatic chuck apparatus and semiconductor manufacturing appar...

Gas recovering apparatus, semiconductor manufacturing system, and g...

Substrate processing apparatus and method of producing semiconducto...

Method for manufacturing semiconductor device having a film with la...

Manufacturing method of semiconductor device

Mask member and method for producing semiconductor device

Method of manufacturing semiconductor device

Variable resistance element and memory device

Method for manufacturing semiconductor device

Patents Applicationslast 30 patents

PIPING, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUF...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PRODUCING SEMICONDUCTO...

ELECTROSTATIC CHUCK APPARATUS AND SEMICONDUCTOR MANUFACTURING APPAR...

GAS RECOVERING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, AND G...

METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF S...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PRODUCING SEMICONDUCTO...

MASK MEMBER AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

VARIABLE RESISTANCE ELEMENT AND MEMORY DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE