Yuya Matsuda

Follow

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Advanced multi-workpiece processing chamber
- Patent number 9,184,072
- Issue date Nov 10, 2015
- Mattson Technology, Inc.
- Daniel J. Devine
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER
- Publication number 20090028761
- Publication date Jan 29, 2009
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS