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Yuya Mizobe
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Hikari, JP
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last 30 patents
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Patent Grant
Vacuum processing apparatus
Patent number
8,366,370
Issue date
Feb 5, 2013
Hitachi High-Technologies Corporation
Tsutomu Nakamura
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20110176893
Publication date
Jul 21, 2011
Tsutomu NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS