Yuya Motoyama

Follow

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,084,072
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180200764
- Publication date Jul 19, 2018
- TOKYO ELECTRON LIMITED
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS