Yuya Takamura

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Deposition method
- Patent number 11,538,678
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Masami Oikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming system
- Patent number 10,297,439
- Issue date May 21, 2019
- Tokyo Electron Limited
- Yuya Takamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230326762
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Masami OIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230096299
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Yuya TAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20220411933
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Yuya TAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD
- Publication number 20210193455
- Publication date Jun 24, 2021
- TOKYO ELECTRON LIMITED
- Masami OIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING SYSTEM
- Publication number 20170250072
- Publication date Aug 31, 2017
- TOKYO ELECTRON LIMITED
- Yuya Takamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...