Yuya TSUCHIHASHI

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,843,223
- Issue date Nov 24, 2020
- SCREEN Holdings Co., Ltd.
- Takayoshi Tanaka
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,786,836
- Issue date Sep 29, 2020
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and processing cup cleaning method
- Patent number 10,658,203
- Issue date May 19, 2020
- SCREEN Holdings Co., Ltd.
- Hiroki Tsujikawa
- B08 - CLEANING
Information Patent Grant
Recovery piping cleaning method and substrate processing apparatus
- Patent number 10,639,683
- Issue date May 5, 2020
- SCREEN Holdings Co., Ltd.
- Yuya Tsuchihashi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and nozzle cleaning method
- Patent number 10,622,225
- Issue date Apr 14, 2020
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180345315
- Publication date Dec 6, 2018
- SCREEN Holdings Co., Ltd.
- Takayoshi TANAKA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180158698
- Publication date Jun 7, 2018
- SCREEN Holdings Co., Ltd.
- Kazuhiro Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECOVERY PIPING CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180085795
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Yuya TSUCHIHASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD
- Publication number 20180061678
- Publication date Mar 1, 2018
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180029089
- Publication date Feb 1, 2018
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING CUP CLEANING METHOD
- Publication number 20180025922
- Publication date Jan 25, 2018
- SCREEN Holdings Co., Ltd.
- Hiroki TSUJIKAWA
- B08 - CLEANING

Yuya TSUCHIHASHI

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and processing cup cleaning method

Recovery piping cleaning method and substrate processing apparatus

Substrate processing apparatus and nozzle cleaning method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

RECOVERY PIPING CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PROCESSING CUP CLEANING METHOD