Yuyang Bian

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Method for improving overlay metrology accuracy of self-aligned mul...
- Patent number 11,762,303
- Issue date Sep 19, 2023
- Shanghai Huali Integrated Circuit Corporation
- Yuyang Bian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dynamic illumination method based on scan exposure machine
- Patent number 11,422,474
- Issue date Aug 23, 2022
- Shanghai Huali Integrated Circuit Corporation
- Yuyang Bian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method for Improving Overlay Metrology Accuracy of Self-Aligned Mul...
- Publication number 20230096180
- Publication date Mar 30, 2023
- Shanghai Huali Integrated Circuit Corporation
- Yuyang Bian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY