Yuzo Ohishi

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,469,115
- Issue date Oct 11, 2022
- Tokyo Electron Limited
- Takaya Kikai
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing system
- Patent number 11,443,964
- Issue date Sep 13, 2022
- Tokyo Electron Limited
- Masatoshi Kaneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ashing apparatus, ashing method and recording medium
- Patent number 11,049,739
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,867,813
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,867,817
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,795,265
- Issue date Oct 6, 2020
- Tokyo Electron Limited
- Norihisa Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,615,062
- Issue date Apr 7, 2020
- Tokyo Electron Limited
- Takaya Kikai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,591,823
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Keisuke Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, substrate processing apparatus, substr...
- Patent number 9,514,951
- Issue date Dec 6, 2016
- Tokyo Electron Limited
- Masatoshi Kaneda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20230197475
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20210066098
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Takaya Kikai
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20200168487
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Takaya Kikai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20200041913
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Norihisa KOGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ASHING APPARATUS, ASHING METHOD AND RECORDING MEDIUM
- Publication number 20190237346
- Publication date Aug 1, 2019
- TOKYO ELECTRON LIMITED
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190148179
- Publication date May 16, 2019
- TOKYO ELECTRON LIMITED
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180218929
- Publication date Aug 2, 2018
- TOKYO ELECTRON LIMITED
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170047233
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Masatoshi Kaneda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160181133
- Publication date Jun 23, 2016
- TOKYO ELECTRON LIMITED
- Keisuke YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, SUBSTR...
- Publication number 20150371894
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Masatoshi Kaneda
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Yuzo Ohishi

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing method and rec...

Substrate processing apparatus and substrate processing system

Ashing apparatus, ashing method and recording medium

Substrate processing apparatus, substrate processing method and rec...

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus and substrate processing method

Substrate processing method, substrate processing apparatus, substr...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

ASHING APPARATUS, ASHING METHOD AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, SUBSTR...