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Ion implantation device
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Patent number 7,511,288
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Issue date Mar 31, 2009
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Ulvac Co., Ltd
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Seiji Ogata
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H01 - BASIC ELECTRIC ELEMENTS
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Parallel scan type ion implanter
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Patent number 5,838,112
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Issue date Nov 17, 1998
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Nihon Shinku Gijutsu Kabushiki Kaisha
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Osamu Tsukakoshi
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implantation apparatus
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Patent number 5,751,002
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Issue date May 12, 1998
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Nihon Shinku Gijutsu Kabushiki Kaisha
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Seiji Ogata
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implantation apparatus
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Patent number 5,028,795
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Issue date Jul 2, 1991
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Nihon Shinku Gijutsu Kabushiki Kaisha
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Yuzo Sakurada
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implantation device
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Patent number 4,983,850
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Issue date Jan 8, 1991
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Nihon Shinku Gijutsu Kabushiki Kaisha
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Osamu Tsukakoshi
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H01 - BASIC ELECTRIC ELEMENTS