Yves Lodewijk Maria CREIJGHTON

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Delft, NL

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Patents Grantslast 30 patents

Information Patent Grant
Method for removing a contamination layer by an atomic layer etchin...
- Patent number 11,199,363
- Issue date Dec 14, 2021
- Carl Zeiss SMT GmbH
- Fred Roozeboom
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REMOVING A CONTAMINATION LAYER BY AN ATOMIC LAYER ETCHIN...
- Publication number 20200142327
- Publication date May 7, 2020
- Carl Zeiss SMT GMBH
- Fred ROOZEBOOM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY