Y.Y. Peng

Person

  • Hsinchu, TW

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    MACHINE LEARNING ON OVERLAY MANAGEMENT

    • Publication number 20230223287
    • Publication date Jul 13, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tzu-Cheng LIN
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    MACHINE LEARNING ON OVERLAY MANAGEMENT

    • Publication number 20210175105
    • Publication date Jun 10, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tzu-Cheng LIN
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    MACHINE LEARNING ON OVERLAY VIRTUAL METROLOGY

    • Publication number 20200006102
    • Publication date Jan 2, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tzu-Cheng Lin
    • G05 - CONTROLLING REGULATING