Zadig Cheung-Ching Lam

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Arcadia, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-segment global alignment mark
- Patent number 6,235,437
- Issue date May 22, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Soon Ee Neoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer stepper method utilizing a multi-segment global alignment mark
- Patent number 6,022,649
- Issue date Feb 8, 2000
- Chartered Semiconductor Manufacturing, Ltd.
- Soon Ee Neoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for enhancement of wafer alignment accuracy
- Patent number 5,734,594
- Issue date Mar 31, 1998
- Chartered Semiconductor Manufacturing Pte Ltd
- Ron-Fu Chu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY