Zaifeng TANG

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer transfer module and method thereof for transferring to-be-tra...
- Patent number 11,972,963
- Issue date Apr 30, 2024
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Preventive maintenance method for chamber of metal etching machine
- Patent number 11,911,809
- Issue date Feb 27, 2024
- Shanghai Huali Microelectronics Corporation
- Minjie Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching a shallow trench
- Patent number 9,842,743
- Issue date Dec 12, 2017
- Shanghai Huali Microelectronics Corporation
- Jin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching polysilicon gate
- Patent number 8,900,887
- Issue date Dec 2, 2014
- Shanghai Huali Microelectronics Corporation
- Zaifeng Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing morphological difference between N-doped and un...
- Patent number 8,658,502
- Issue date Feb 25, 2014
- Shanghai Huali Microelectronics Corporation
- Zaifeng Tang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Improving Stability of Etching Rate of Etching Chamber
- Publication number 20230162995
- Publication date May 25, 2023
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Kaiqu Ang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Preventive Maintenance Method for Chamber of Metal Etching Machine
- Publication number 20230143115
- Publication date May 11, 2023
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Minjie Chen
- B08 - CLEANING
Information Patent Application
Method for Manufacturing Shallow Trench Isolation
- Publication number 20220277986
- Publication date Sep 1, 2022
- Shanghai Huali Integrated Circuit Corporation
- Jin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PUMPING VALVE FOR SEMICONDUCTOR EQUIPMENT AND VACUUM CONTROL...
- Publication number 20220165576
- Publication date May 26, 2022
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Transfer Module and Method Thereof for Transferring To-Be-Tra...
- Publication number 20220139749
- Publication date May 5, 2022
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING POLYSILICON GATE
- Publication number 20140106475
- Publication date Apr 17, 2014
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Zaifeng TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REDUCING MORPHOLOGICAL DIFFERENCE BETWEEN N-DOPED AND UN...
- Publication number 20130316539
- Publication date Nov 28, 2013
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Zaifeng TANG
- H01 - BASIC ELECTRIC ELEMENTS

Zaifeng TANG

Person

Patents Grantslast 30 patents

Wafer transfer module and method thereof for transferring to-be-tra...

Preventive maintenance method for chamber of metal etching machine

Method of etching a shallow trench

Method for etching polysilicon gate

Method for reducing morphological difference between N-doped and un...

Patents Applicationslast 30 patents

Method for Improving Stability of Etching Rate of Etching Chamber

Preventive Maintenance Method for Chamber of Metal Etching Machine

Method for Manufacturing Shallow Trench Isolation

VACUUM PUMPING VALVE FOR SEMICONDUCTOR EQUIPMENT AND VACUUM CONTROL...

Wafer Transfer Module and Method Thereof for Transferring To-Be-Tra...

METHOD FOR ETCHING POLYSILICON GATE

METHOD FOR REDUCING MORPHOLOGICAL DIFFERENCE BETWEEN N-DOPED AND UN...