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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry etching method
    • Patent number 11,018,014
    • Issue date May 25, 2021
    • HITACHI HIGH-TECH CORPORATION
    • Ze Shen
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    DRY ETCHING METHOD
    • Publication number 20160307765
    • Publication date Oct 20, 2016
    • Hitachi High-Technologies Corporation
    • Ze SHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING METHOD
    • Publication number 20150099368
    • Publication date Apr 9, 2015
    • Hitachi High-Technologies Corporation
    • Ze SHEN
    • H01 - BASIC ELECTRIC ELEMENTS