Membership
Tour
Register
Log in
Ze Xiang Shen
Follow
Person
Singapore, SG
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method to form C54 TiSi2 for IC device fabrication
Patent number
6,777,329
Issue date
Aug 17, 2004
Chartered Semiconductor Manufacturing Ltd.
Shaoyin Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Novel method to form C54 TiSi2 for IC device fabrication
Publication number
20020155703
Publication date
Oct 24, 2002
Chartered Semiconductor Manufacturing Ltd.
Shaoyin Chen
H01 - BASIC ELECTRIC ELEMENTS