Zecheng Liu

Person

Sagamihara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition method and an apparatus for depositing a silicon-contain...
- Patent number 12,107,005
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for filling a gap and related systems and devices
- Patent number 12,094,769
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for filling a gap and related systems and devices
- Patent number 12,027,365
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STRUCTURES INCLUDING A SiOCN PHOTORESIST ADHESION LAYER AND METAL-O...
- Publication number 20240361695
- Publication date Oct 31, 2024
- ASM IP HOLDING B.V.
- João Ricardo Antunes Afonso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA-ENHANCED METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE...
- Publication number 20230340663
- Publication date Oct 26, 2023
- ASM IP HOLDING B.V.
- Fanyong Ran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE LAYER AND STRUCT...
- Publication number 20230235453
- Publication date Jul 27, 2023
- ASM IP HOLDING B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SIOC AND SIOCN LOW-K SPACERS
- Publication number 20230162971
- Publication date May 25, 2023
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND...
- Publication number 20220350248
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF TREATING A SUBSTRATE
- Publication number 20220216059
- Publication date Jul 7, 2022
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FILLING A GAP AND RELATED SYSTEMS AND DEVICES
- Publication number 20220165615
- Publication date May 26, 2022
- ASM IP HOLDING B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FILLING A GAP AND RELATED SYSTEMS AND DEVICES
- Publication number 20220165569
- Publication date May 26, 2022
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND AN APPARATUS FOR DEPOSITING A SILICON-CONTAIN...
- Publication number 20220108915
- Publication date Apr 7, 2022
- ASM IP HOLDING B.V.
- Zecheng Liu
- H01 - BASIC ELECTRIC ELEMENTS

Zecheng Liu

Person

Patents Grantslast 30 patents

Deposition method and an apparatus for depositing a silicon-contain...

Methods for filling a gap and related systems and devices

Methods for filling a gap and related systems and devices

Patents Applicationslast 30 patents

STRUCTURES INCLUDING A SiOCN PHOTORESIST ADHESION LAYER AND METAL-O...

PLASMA-ENHANCED METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE...

METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE LAYER AND STRUCT...

METHOD OF FORMING SIOC AND SIOCN LOW-K SPACERS

METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND...

METHOD OF TREATING A SUBSTRATE

METHODS FOR FILLING A GAP AND RELATED SYSTEMS AND DEVICES

METHODS FOR FILLING A GAP AND RELATED SYSTEMS AND DEVICES

DEPOSITION METHOD AND AN APPARATUS FOR DEPOSITING A SILICON-CONTAIN...