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Zefram Marks
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Gilroy, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Optical etendue matching methods for extreme ultraviolet metrology
Patent number
11,968,772
Issue date
Apr 23, 2024
KLA Corporation
Zefram Marks
G01 - MEASURING TESTING
Information
Patent Grant
Boron-based capping layers for EUV optics
Patent number
11,268,911
Issue date
Mar 8, 2022
KLA-Tencor Corporation
Gildardo R Delgado
G01 - MEASURING TESTING
Information
Patent Grant
Vacuum actuator containment for molecular contaminant and particle...
Patent number
11,156,926
Issue date
Oct 26, 2021
KLA Corporation
Zefram D. Marks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for photocathode illumination inspection
Patent number
10,840,055
Issue date
Nov 17, 2020
KLA Corporation
Gildardo Delgado
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photocathode emitter system that generates multiple electron beams
Patent number
10,741,354
Issue date
Aug 11, 2020
KLA-Tencor Corporation
Gildardo R. Delgado
G01 - MEASURING TESTING
Information
Patent Grant
Metal protective layer for electron emitters with a diffusion barrier
Patent number
10,714,294
Issue date
Jul 14, 2020
KLA-Tencor Corporation
Frances Hill
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Integration of an Optical Height Sensor in Mask Inspection Tools
Publication number
20220196572
Publication date
Jun 23, 2022
KLA Corporation
Zefram Marks
G01 - MEASURING TESTING
Information
Patent Application
Ionic Liquids as Lubricants in Optical Systems
Publication number
20210132506
Publication date
May 6, 2021
KLA Corporation
Zefram Marks
C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information
Patent Application
VACUUM ACTUATOR CONTAINMENT FOR MOLECULAR CONTAMINANT AND PARTICLE...
Publication number
20210048756
Publication date
Feb 18, 2021
KLA Corporation
Zefram D. Marks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical Etendue Matching Methods for Extreme Ultraviolet Metrology
Publication number
20200383200
Publication date
Dec 3, 2020
KLA Corporation
Zefram Marks
G02 - OPTICS
Information
Patent Application
PHOTOCATHODE EMITTER SYSTEM THAT GENERATES MULTIPLE ELECTRON BEAMS
Publication number
20200279713
Publication date
Sep 3, 2020
KLA-Tencor Corporation
Gildardo R. Delgado
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Boron-Based Capping Layers for EUV Optics
Publication number
20200217804
Publication date
Jul 9, 2020
KLA-Tencor Corporation
Gildardo R. Delgado
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL PROTECTIVE LAYER FOR ELECTRON EMITTERS WITH A DIFFUSION BARRIER
Publication number
20190362927
Publication date
Nov 28, 2019
KLA-Tencor Corporation
Frances Hill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Photocathode Illumination Inspection
Publication number
20190295804
Publication date
Sep 26, 2019
KLA-Tencor Corporation
Gildardo Delgado
H01 - BASIC ELECTRIC ELEMENTS