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Zempei Kawazu
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Itami, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing SiC epitaxial wafer
Patent number
9,988,738
Issue date
Jun 5, 2018
Mitsubishi Electric Corporation
Nobuyuki Tomita
C30 - CRYSTAL GROWTH
Information
Patent Grant
Single-crystal 4H-SiC substrate
Patent number
9,903,048
Issue date
Feb 27, 2018
Mitsubishi Electric Corporation
Akihito Ohno
C30 - CRYSTAL GROWTH
Information
Patent Grant
Substrate support and semiconductor manufacturing apparatus
Patent number
9,824,911
Issue date
Nov 21, 2017
Mitsubishi Electric Corporation
Akihito Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing a single-crystal 4H—SiC substrate
Patent number
9,752,254
Issue date
Sep 5, 2017
Mitsubishi Electric Corporation
Akihito Ohno
C30 - CRYSTAL GROWTH
Information
Patent Grant
Single-crystal 4H-SiC substrate
Patent number
9,422,640
Issue date
Aug 23, 2016
Mitsubishi Electric Corporation
Akihito Ohno
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method of manufacturing nitride semiconductor device
Patent number
7,378,351
Issue date
May 27, 2008
Mitsubishi Denki Kabushiki Kaisha
Katsuomi Shiozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating semiconductor laser
Patent number
7,151,004
Issue date
Dec 19, 2006
Mitsubishi Denki Kabushiki Kaisha
Yoshihisa Tashiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating a semiconductor device
Patent number
6,737,288
Issue date
May 18, 2004
Mitsubishi Denki Kabushiki Kaisha
Zempei Kawazu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device including Gallium nitride layer
Patent number
5,880,485
Issue date
Mar 9, 1999
Mitsubishi Denki Kabushiki Kaisha
Diethard Marx
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device including T1 GaAs layer
Patent number
5,841,156
Issue date
Nov 24, 1998
Mitsubishi Denki Kabushiki Kaisha
Yasutomo Kajikawa
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Semiconductor light emitting device
Patent number
5,764,673
Issue date
Jun 9, 1998
Mitsubishi Denki Kabushiki Kaisha
Zempei Kawazu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heteroepitaxial semiconductor device including silicon substrate, G...
Patent number
5,760,426
Issue date
Jun 2, 1998
Mitsubishi Denki Kabushiki Kaisha
Diethard Marx
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor light emitting diode producing visible light
Patent number
5,739,552
Issue date
Apr 14, 1998
Mitsubishi Denki Kabushiki Kaisha
Tatsuya Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor laser producing short wavelength light
Patent number
5,701,321
Issue date
Dec 23, 1997
Mitsubishi Denki Kabushiki Kaisha
Norio Hayafuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Material supplying apparatus
Patent number
5,582,647
Issue date
Dec 10, 1996
Mitsubishi Denki Kabushiki Kaisha
Manabu Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor light emitting element with II-VI and III-V compounds
Patent number
5,539,239
Issue date
Jul 23, 1996
Mitsubishi Denki Kabushiki Kaisha
Zempei Kawazu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making II-VI semiconductor infrared light detector
Patent number
5,535,699
Issue date
Jul 16, 1996
Mitsubishi Denki Kabushiki Kaisha
Zempei Kawazu
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MANUFACTURING A SINGLE-CRYSTAL 4H-SiC SUBSTRATE
Publication number
20160298262
Publication date
Oct 13, 2016
Mitsubishi Electric Corporation
Akihito Ohno
C30 - CRYSTAL GROWTH
Information
Patent Application
SINGLE-CRYSTAL 4H-SiC SUBSTRATE
Publication number
20160298264
Publication date
Oct 13, 2016
Mitsubishi Electric Corporation
Akihito Ohno
C30 - CRYSTAL GROWTH
Information
Patent Application
SIC EPITAXIAL WAFER PRODUCTION METHOD
Publication number
20150354090
Publication date
Dec 10, 2015
MITSUBISHI ELECTRIC CORPORATION
Nobuyuki TOMITA
C30 - CRYSTAL GROWTH
Information
Patent Application
SINGLE-CRYSTAL 4H-SiC SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20140295136
Publication date
Oct 2, 2014
Mitsubishi Electric Corporation
Akihito Ohno
C30 - CRYSTAL GROWTH
Information
Patent Application
SUBSTRATE SUPPORT AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20130327274
Publication date
Dec 12, 2013
Mitsubishi Electric Corporation
Akihito Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20130109134
Publication date
May 2, 2013
Mitsubishi Electric Corporation
Susumu HATAKENAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR LASER
Publication number
20100003778
Publication date
Jan 7, 2010
Mitsubishi Electric Corporation
Hitoshi Tada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing nitride semiconductor device
Publication number
20060003490
Publication date
Jan 5, 2006
Mitsubishi Denki Kabushiki Kaisha
Katsuomi Shiozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabricating semiconductor laser
Publication number
20040165633
Publication date
Aug 26, 2004
Mitsubishi Denki Kabushiki Kaisha
Yoshihisa Tashiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for fabricating a semiconductor device
Publication number
20020175343
Publication date
Nov 28, 2002
Mitsubishi Denki Kabushiki Kaisha
Zempei Kawazu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor laser device and method for fabricating the same
Publication number
20020075923
Publication date
Jun 20, 2002
Yoshihisa Tashiro
H01 - BASIC ELECTRIC ELEMENTS