Zengdi LIAN

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Patents Grantslast 30 patents

Information Patent Grant
Bottom electrode assembly, plasma processing apparatus, and method...
- Patent number 12,094,693
- Issue date Sep 17, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Jiangtao Pei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion-resistant structure for a gas delivery system in a plasma...
- Patent number 11,348,763
- Issue date May 31, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Zengdi Lian
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BOTTOM ELECTRODE ASSEMBLY, PLASMA PROCESSING APPARATUS, AND METHOD...
- Publication number 20220165551
- Publication date May 26, 2022
- Advanced Micro-Fabrication Equipment Inc. China
- Jiangtao PEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORROSION-RESISTANT STRUCTURE FOR A GAS DELIVERY SYSTEM IN A PLASMA...
- Publication number 20200381213
- Publication date Dec 3, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Zengdi LIAN
- H01 - BASIC ELECTRIC ELEMENTS