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Zengqin ZHAO
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Zhubei City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method for optimized wafer process simulation
Patent number
10,698,320
Issue date
Jun 30, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Ru-Gun Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern modification and patterning process
Patent number
10,514,613
Issue date
Dec 24, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Ming Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DEFECT INSPECTION SYSTEM AND METHOD OF USING THE SAME
Publication number
20230049405
Publication date
Feb 16, 2023
Taiwan Semiconductor Manufacturing Co., Lid.
Chih-Kai Yang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method for Optimized Wafer Process Simulation
Publication number
20180165388
Publication date
Jun 14, 2018
Taiwan Semiconductor Manufacturing Co., LTD
Ru-Gun Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN MODIFICATION AND PATTERNING PROCESS
Publication number
20180149982
Publication date
May 31, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Ming CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY