Zenichi Hamaya

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint method, imprint apparatus, and method of manufacturing article
- Patent number 11,747,722
- Issue date Sep 5, 2023
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and method for manufacturing art...
- Patent number 11,314,167
- Issue date Apr 26, 2022
- Canon Kabushiki Kaisha
- Yosuke Murakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus
- Patent number 10,095,117
- Issue date Oct 9, 2018
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Interferometer system, lithography apparatus, and article manufactu...
- Patent number 9,804,510
- Issue date Oct 31, 2017
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus
- Patent number 9,400,426
- Issue date Jul 26, 2016
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus
- Patent number 9,285,675
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Interferometric measurement of rotation of stage apparatus and adju...
- Patent number 9,217,937
- Issue date Dec 22, 2015
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Grant
Positioning apparatus, exposure apparatus, and device manufacturing...
- Patent number 7,646,488
- Issue date Jan 12, 2010
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20200264507
- Publication date Aug 20, 2020
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR MANUFACTURING AR...
- Publication number 20190317398
- Publication date Oct 17, 2019
- Canon Kabushiki Kaisha
- Yosuke Murakami
- B82 - NANO-TECHNOLOGY
Information Patent Application
MOLD REPLICATING METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20170210036
- Publication date Jul 27, 2017
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20160306281
- Publication date Oct 20, 2016
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
- Publication number 20140198307
- Publication date Jul 17, 2014
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Application
STAGE APPARATUS AND ADJUSTMENT METHOD THEREOF, EXPOSURE APPARATUS,...
- Publication number 20140125962
- Publication date May 8, 2014
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20130056904
- Publication date Mar 7, 2013
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20130056905
- Publication date Mar 7, 2013
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100068659
- Publication date Mar 18, 2010
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20080136078
- Publication date Jun 12, 2008
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Zenichi Hamaya

Person

Patents Grantslast 30 patents

Imprint method, imprint apparatus, and method of manufacturing article

Imprint apparatus, imprint method, and method for manufacturing art...

Imprint apparatus

Interferometer system, lithography apparatus, and article manufactu...

Imprint apparatus

Imprint apparatus

Interferometric measurement of rotation of stage apparatus and adju...

Positioning apparatus, exposure apparatus, and device manufacturing...

Patents Applicationslast 30 patents

IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR MANUFACTURING AR...

MOLD REPLICATING METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURI...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...

STAGE APPARATUS AND ADJUSTMENT METHOD THEREOF, EXPOSURE APPARATUS,...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...