Zenta HORI

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KANAGAWA, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate inspection apparatus and mask inspection apparatus
- Patent number 8,760,642
- Issue date Jun 24, 2014
- Lasertec Corporation
- Zenta Hori
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION APPARATUS AND MASK INSPECTION APPARATUS
- Publication number 20120287424
- Publication date Nov 15, 2012
- LASERTEC CORPORATION
- Zenta HORI
- G01 - MEASURING TESTING