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Hydrogen free silicon dioxide
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Patent number 11,732,352
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Issue date Aug 22, 2023
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Applied Materials, Inc.
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Zeqing Shen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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HDP sacrificial carbon gapfill
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Patent number 11,655,537
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Issue date May 23, 2023
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Applied Materials, Inc.
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Zeqing Shen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Conformal silicon oxide film deposition
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Patent number 11,658,026
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Issue date May 23, 2023
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Applied Materials, Inc.
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Zeqing Shen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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