Zhao H. CENG

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Enhanced productivity for an etch system through polymer management
- Patent number 10,037,883
- Issue date Jul 31, 2018
- Applied Materials, Inc.
- Robert Chebi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENHANCED PRODUCTIVITY FOR AN ETCH SYSTEM THROUGH POLYMER MANAGEMENT
- Publication number 20140273520
- Publication date Sep 18, 2014
- Robert CHEBI
- H01 - BASIC ELECTRIC ELEMENTS