Zhaohui Xi

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing device
- Patent number 9,275,870
- Issue date Mar 1, 2016
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Lei Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for autotuning of RF match
- Patent number 9,099,284
- Issue date Aug 4, 2015
- Advanced Micro-Fabrication Equipment, Inc. Asia
- James Yang
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING DEVICE
- Publication number 20140106572
- Publication date Apr 17, 2014
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Lei Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR AUTOTUNING OF RF MATCH
- Publication number 20130119017
- Publication date May 16, 2013
- James YANG
- H01 - BASIC ELECTRIC ELEMENTS