Zhaoyang Xu

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Gas showerhead, manufacturing method, and plasma apparatus includin...
- Patent number 11,309,165
- Issue date Apr 19, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma confinement apparatus, and method for confining a plasma
- Patent number 10,187,965
- Issue date Jan 22, 2019
- ADVANCED MICRO-FABRICATION EQUIPMENT, INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating packaged chamber parts for semiconductor plasma apparatus
- Patent number 9,951,435
- Issue date Apr 24, 2018
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating packaged chamber parts for semiconductor plasma apparatus
- Patent number 9,617,633
- Issue date Apr 11, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma confinement apparatus, and method for confining a plasma
- Patent number 8,608,851
- Issue date Dec 17, 2013
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Tom Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS SHOWERHEAD, MANUFACTURING METHOD, AND PLASMA APPARATUS INCLUDIN...
- Publication number 20200321193
- Publication date Oct 8, 2020
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS
- Publication number 20190338408
- Publication date Nov 7, 2019
- Advanced Micro-Fabrication Equipment Inc. China
- Xiaoming HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS
- Publication number 20170241038
- Publication date Aug 24, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming HE
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS
- Publication number 20140116338
- Publication date May 1, 2014
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS
- Publication number 20140120312
- Publication date May 1, 2014
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING PACKAGED SHOWERHEAD PERFORMANCE ENHANCEMENT FOR SEMICONDUCT...
- Publication number 20140117120
- Publication date May 1, 2014
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Xiaoming HE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CONFINEMENT APPARATUS, AND METHOD FOR CONFINING A PLASMA
- Publication number 20140103805
- Publication date Apr 17, 2014
- ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
- Tom Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma confinement apparatus, and method for confining a plasma
- Publication number 20070085483
- Publication date Apr 19, 2007
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Tom Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Zhaoyang Xu

Person

Patents Grantslast 30 patents

Gas showerhead, manufacturing method, and plasma apparatus includin...

Plasma confinement apparatus, and method for confining a plasma

Coating packaged chamber parts for semiconductor plasma apparatus

Coating packaged chamber parts for semiconductor plasma apparatus

Plasma confinement apparatus, and method for confining a plasma

Patents Applicationslast 30 patents

GAS SHOWERHEAD, MANUFACTURING METHOD, AND PLASMA APPARATUS INCLUDIN...

COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS

COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS

COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS

COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS

COATING PACKAGED SHOWERHEAD PERFORMANCE ENHANCEMENT FOR SEMICONDUCT...

PLASMA CONFINEMENT APPARATUS, AND METHOD FOR CONFINING A PLASMA

Plasma confinement apparatus, and method for confining a plasma