Zhe Zhang

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Irvine, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Vapor phase cleaning of alkali and alkaline earth metals
- Patent number 6,107,166
- Issue date Aug 22, 2000
- FSI International, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metals removal process
- Patent number 6,083,413
- Issue date Jul 4, 2000
- Massachusetts Institute of Technology
- Herbert H. Sawin
- B08 - CLEANING