Zhen-Long Chen

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for monitoring trench profiles and for spectro...
- Patent number 7,372,579
- Issue date May 13, 2008
- Infineon Technologies, AG
- Zhen-Long Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for monitoring trench profiles and for spectro...
- Publication number 20070247634
- Publication date Oct 25, 2007
- Zhen-Long Chen
- G01 - MEASURING TESTING