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Selective barrier metal polishing method
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Patent number 7,981,316
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Issue date Jul 19, 2011
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Zhendong Liu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Multi-component barrier polishing solution
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Patent number 7,842,192
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Issue date Nov 30, 2010
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Jinru Bian
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Selective barrier metal polishing solution
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Patent number 7,300,602
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Issue date Nov 27, 2007
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Zhendong Liu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Barrier polishing solution
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Patent number 7,253,111
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Issue date Aug 7, 2007
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Rohm and Haas Electronic Materials CMP Holding, Inc.
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Zhendong Liu
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H01 - BASIC ELECTRIC ELEMENTS
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