Zheng-Hao ZHANG

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Hsinchu City, TW

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Patents Applicationslast 30 patents

Information Patent Application
APPARATUSES AND METHODS FOR REDUCING PARTICLE CONTAMINATION OF WAFE...
- Publication number 20240006202
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Zheng-Hao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION METHOD OF EUV PELLICLE STATUS
- Publication number 20230393489
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hao LIU
- G06 - COMPUTING CALCULATING COUNTING