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last 30 patents
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Patent Grant
Method and apparatus to prevent contamination of optical element by...
Patent number
7,701,549
Issue date
Apr 20, 2010
Semiconductor Manufacturing International (Shanghai) Corporation
Chin Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Method and apparatus to prevent contamination of optical element by...
Publication number
20080106708
Publication date
May 8, 2008
Semiconductor Manufacturing International (Shanghai) Corporation
Chin Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY