Zhengquan Tan

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Bandgap measurements of patterned film stacks using spectroscopic m...
- Patent number 11,796,390
- Issue date Oct 24, 2023
- KLA Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry based methods and systems for measurement of strain i...
- Patent number 11,573,077
- Issue date Feb 7, 2023
- KLA Corporation
- Houssam Chouaib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring thin films on grating and bandgap on grating
- Patent number 11,555,689
- Issue date Jan 17, 2023
- KLA-Tencor Corporation
- Houssam Chouaib
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bandgap measurements of patterned film stacks using spectroscopic m...
- Patent number 11,378,451
- Issue date Jul 5, 2022
- KLA Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry based methods and systems for measurement of strain i...
- Patent number 11,060,846
- Issue date Jul 13, 2021
- KLA Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Grant
Measuring thin films on grating and bandgap on grating
- Patent number 10,663,286
- Issue date May 26, 2020
- KLA-Tencor Corporation
- Houssam Chouaib
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Model based optical measurements of semiconductor structures with a...
- Patent number 10,458,912
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Houssam Chouaib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Model building and analysis engine for combined X-ray and optical m...
- Patent number 10,013,518
- Issue date Jul 3, 2018
- KLA-Tencor Corporation
- Michael S. Bakeman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for measurement or analysis of a nitrogen concentration of...
- Patent number 7,349,079
- Issue date Mar 25, 2008
- KLA-Tencor Technologies Corp.
- Qiang Zhao
- G01 - MEASURING TESTING
Information Patent Grant
HDP-CVD deposition process for filling high aspect ratio gaps
- Patent number 7,196,021
- Issue date Mar 27, 2007
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multistep remote plasma clean process
- Patent number 7,159,597
- Issue date Jan 9, 2007
- Applied Materials, Inc.
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for high aspect ratio HDP CVD gapfill
- Patent number 7,064,077
- Issue date Jun 20, 2006
- Applied Materials
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
- Patent number 6,929,700
- Issue date Aug 16, 2005
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HDP-CVD deposition process for filling high aspect ratio gaps
- Patent number 6,914,016
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for high aspect ratio HDP CVD gapfill
- Patent number 6,812,153
- Issue date Nov 2, 2004
- Applied Materials Inc.
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HDP-CVD deposition process for filling high aspect ratio gaps
- Patent number 6,740,601
- Issue date May 25, 2004
- Applied Materials Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cleaning a semiconductor wafer processing...
- Patent number 6,715,496
- Issue date Apr 6, 2004
- Applied Materials Inc.
- Michael Chiu Kwan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with extended radio frequency electrode upper sur...
- Patent number 6,682,603
- Issue date Jan 27, 2004
- Applied Materials Inc.
- Sudhir Gondhalekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cleaning a semiconductor wafer processing...
- Patent number 6,596,123
- Issue date Jul 22, 2003
- Applied Materials, Inc.
- Michael Chiu Kwan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
- Patent number 6,596,653
- Issue date Jul 22, 2003
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HDP-CVD deposition of low dielectric constant amorphous carbon film
- Patent number 6,423,384
- Issue date Jul 23, 2002
- Applied Materials, Inc.
- Kasra Khazeni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Multiple Pass Optical Measurements Of Semiconductor Structures
- Publication number 20250012734
- Publication date Jan 9, 2025
- KLA Corporation
- Zhengquan Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY OF NANOSHEET SURFACE ROUGHNESS AND PROFILE
- Publication number 20240377758
- Publication date Nov 14, 2024
- KLA Corporation
- Houssam Chouaib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods And Systems For Measurement Of Semiconductor Structures Bas...
- Publication number 20240151770
- Publication date May 9, 2024
- KLA Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...
- Publication number 20220349752
- Publication date Nov 3, 2022
- KLA Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Application
Scatterometry Based Methods And Systems For Measurement Of Strain I...
- Publication number 20210293532
- Publication date Sep 23, 2021
- KLA Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
Measuring Thin Films on Grating and Bandgap on Grating
- Publication number 20200240768
- Publication date Jul 30, 2020
- KLA-Tencor Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
Scatterometry Based Methods And Systems For Measurement Of Strain I...
- Publication number 20200200525
- Publication date Jun 25, 2020
- KLA Corporation
- Houssam Chouaib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measuring Thin Films on Grating and Bandgap on Grating
- Publication number 20190063900
- Publication date Feb 28, 2019
- KLA-Tencor Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...
- Publication number 20190041266
- Publication date Feb 7, 2019
- KLA-Tencor Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Application
MODEL BASED OPTICAL MEASUREMENTS OF SEMICONDUCTOR STRUCTURES WITH A...
- Publication number 20180059019
- Publication date Mar 1, 2018
- KLA-Tencor Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
MODEL BUILDING AND ANALYSIS ENGINE FOR COMBINED X-RAY AND OPTICAL M...
- Publication number 20140019097
- Publication date Jan 16, 2014
- Michael S. Bakeman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods for measurement or analysis of a nitrogen concentration of...
- Publication number 20050254049
- Publication date Nov 17, 2005
- Qiang Zhao
- G01 - MEASURING TESTING
Information Patent Application
HDP-CVD deposition process for filling high aspect ratio gaps
- Publication number 20050181632
- Publication date Aug 18, 2005
- APPLIED MATERIALS, INC., A Delaware corporation
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for high aspect ratio HDP CVD gapfill
- Publication number 20050079715
- Publication date Apr 14, 2005
- Applied Materials, Inc.
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HDP-CVD deposition process for filling high aspect ratio gaps
- Publication number 20040152341
- Publication date Aug 5, 2004
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH EXTENDED RADIO FREQUENCY ELECTRODE UPPER SUR...
- Publication number 20030211757
- Publication date Nov 13, 2003
- Applied Materials, Inc.
- Sudhir Gondhalekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for high aspect ratio HDP CVD gapfill
- Publication number 20030203637
- Publication date Oct 30, 2003
- Applied Materials, Inc.
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for cleaning a semiconductor wafer processing...
- Publication number 20030164224
- Publication date Sep 4, 2003
- Michael Chiu Kwan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
- Publication number 20030159656
- Publication date Aug 28, 2003
- Applied Materials, Inc.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multistep remote plasma clean process
- Publication number 20030029475
- Publication date Feb 13, 2003
- APPLIED MATERIALS, INC., A Delaware corporation
- Zhong Qiang Hua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HDP-CVD deposition process for filling high aspect ratio gaps
- Publication number 20020187655
- Publication date Dec 12, 2002
- APPLIED MATERIALS, INC.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
- Publication number 20020187656
- Publication date Dec 12, 2002
- APPLIED MATERIALS, INC.
- Zhengquan Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Zhengquan Tan

Person

Patents Grantslast 30 patents

Bandgap measurements of patterned film stacks using spectroscopic m...

Scatterometry based methods and systems for measurement of strain i...

Measuring thin films on grating and bandgap on grating

Bandgap measurements of patterned film stacks using spectroscopic m...

Scatterometry based methods and systems for measurement of strain i...

Measuring thin films on grating and bandgap on grating

Model based optical measurements of semiconductor structures with a...

Model building and analysis engine for combined X-ray and optical m...

Methods for measurement or analysis of a nitrogen concentration of...

HDP-CVD deposition process for filling high aspect ratio gaps

Multistep remote plasma clean process

Method for high aspect ratio HDP CVD gapfill

Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD

HDP-CVD deposition process for filling high aspect ratio gaps

Method for high aspect ratio HDP CVD gapfill

HDP-CVD deposition process for filling high aspect ratio gaps

Method and apparatus for cleaning a semiconductor wafer processing...

Substrate support with extended radio frequency electrode upper sur...

Method and apparatus for cleaning a semiconductor wafer processing...

Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD

HDP-CVD deposition of low dielectric constant amorphous carbon film

Patents Applicationslast 30 patents

Multiple Pass Optical Measurements Of Semiconductor Structures

METROLOGY OF NANOSHEET SURFACE ROUGHNESS AND PROFILE

Methods And Systems For Measurement Of Semiconductor Structures Bas...

Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...

Scatterometry Based Methods And Systems For Measurement Of Strain I...

Measuring Thin Films on Grating and Bandgap on Grating

Scatterometry Based Methods And Systems For Measurement Of Strain I...

Measuring Thin Films on Grating and Bandgap on Grating

Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...

MODEL BASED OPTICAL MEASUREMENTS OF SEMICONDUCTOR STRUCTURES WITH A...

MODEL BUILDING AND ANALYSIS ENGINE FOR COMBINED X-RAY AND OPTICAL M...

Methods for measurement or analysis of a nitrogen concentration of...

HDP-CVD deposition process for filling high aspect ratio gaps

Method for high aspect ratio HDP CVD gapfill

HDP-CVD deposition process for filling high aspect ratio gaps

SUBSTRATE SUPPORT WITH EXTENDED RADIO FREQUENCY ELECTRODE UPPER SUR...

Method for high aspect ratio HDP CVD gapfill

Method and apparatus for cleaning a semiconductor wafer processing...

Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD

Multistep remote plasma clean process

HDP-CVD deposition process for filling high aspect ratio gaps

Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD