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Zhengyu Wang
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Santa Clara, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Detection of thin lines for selective sensitivity during reticle in...
Patent number
9,092,847
Issue date
Jul 28, 2015
KLA-Tencor Corporation
Zhengyu Wang
G01 - MEASURING TESTING
Information
Patent Grant
Detection of thin lines for selective sensitivity during reticle in...
Patent number
8,855,400
Issue date
Oct 7, 2014
KLA-Tencor Corporation
Zhengyu Wang
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
DETECTION OF THIN LINES FOR SELECTIVE SENSITIVITY DURING RETICLE IN...
Publication number
20140369593
Publication date
Dec 18, 2014
KLA-Tencor Corporation
Zhengyu Wang
G01 - MEASURING TESTING
Information
Patent Application
DETECTION OF THIN LINES FOR SELECTIVE SENSITIVITY DURING RETICLE IN...
Publication number
20130236083
Publication date
Sep 12, 2013
KLA-Tencor Corporation
Zhengyu Wang
G01 - MEASURING TESTING