Zhenjie Xu

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for chemical-mechanical polishing
- Patent number 10,857,646
- Issue date Dec 8, 2020
- Tsinghua University
- Zhenjie Xu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chemical mechanical polishing machine and chemical mechanical polis...
- Patent number 9,138,857
- Issue date Sep 22, 2015
- HWATSING TECHNOLOGY CO., LTD.
- Xinchun Lu
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR CHEMICAL-MECHANICAL POLISHING
- Publication number 20180345446
- Publication date Dec 6, 2018
- TSINGHUA UNIVERSITY
- Zhenjie XU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHEMICAL MECHANICAL POLISHING MACHINE AND CHEMICAL MECHANICAL POLIS...
- Publication number 20130130601
- Publication date May 23, 2013
- Xinchun Lu
- B24 - GRINDING POLISHING