Zhenming Chu

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus
- Patent number 11,298,727
- Issue date Apr 12, 2022
- ACM Research (Shanghai) Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Grant
Fall-proof apparatus for cleaning semiconductor devices and a chamb...
- Patent number 10,770,315
- Issue date Sep 8, 2020
- ACM Research (Shanghai) Inc.
- Zhenming Chu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
WAFER BACKSIDE CLEANING METHOD
- Publication number 20250046598
- Publication date Feb 6, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRYING APPARATUS AND METHOD BASED ON SUPERCRITICAL FLUID
- Publication number 20240363370
- Publication date Oct 31, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS
- Publication number 20210187563
- Publication date Jun 24, 2021
- ACM Research (Shanghai) Inc.
- Hui Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20190252215
- Publication date Aug 15, 2019
- ACM Research (Shanghai) Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Application
A FALL-PROOF APPARATUS FOR CLEANING SEMICONDUCTOR DEVICES AND A CHA...
- Publication number 20180033654
- Publication date Feb 1, 2018
- ACM Research (Shanghai) Inc.
- Zhenming Chu
- B08 - CLEANING