Zhenxu Pang

Follow

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Plating apparatus for metallization on semiconductor workpiece
- Patent number 8,518,224
- Issue date Aug 27, 2013
- ACM Research (Shanghai) Inc.
- Yue Ma
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for thermal treatment of semiconductor workpieces
- Patent number 8,383,429
- Issue date Feb 26, 2013
- ACM Research (Shanghai) Inc.
- Yue Ma
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROCHEMICAL DEPOSITION SYSTEM
- Publication number 20110073469
- Publication date Mar 31, 2011
- Yue Ma
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS FOR METALLIZATION ON SEMICONDUCTOR WORKPIECE
- Publication number 20100307913
- Publication date Dec 9, 2010
- ACM Research (Shanghai) Inc.
- Yue Ma
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR THERMAL TREATMENT OF SEMICONDUCTOR WORKPIECES
- Publication number 20100240226
- Publication date Sep 23, 2010
- Yue Ma
- H01 - BASIC ELECTRIC ELEMENTS