Zhian Guo

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Mesoscopic defect detection for reticle inspection
- Patent number 9,607,371
- Issue date Mar 28, 2017
- KLA-Tencor Corporation
- Rui-fang Shi
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
MESOSCOPIC DEFECT DETECTION FOR RETICLE INSPECTION
- Publication number 20150279014
- Publication date Oct 1, 2015
- Rui-fang Shi
- G06 - COMPUTING CALCULATING COUNTING