Membership
Tour
Register
Log in
Zhigang MAO
Follow
Person
San Jose, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method for improving CD micro-loading in photomask plasma etching
Patent number
10,199,224
Issue date
Feb 5, 2019
Applied Materials, Inc.
Zhigang Mao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for improving CD micro-loading in photomask plasma etching
Patent number
9,425,062
Issue date
Aug 23, 2016
Applied Materials, Inc.
Zhigang Mao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selectively etching an aluminum containing layer
Patent number
7,208,420
Issue date
Apr 24, 2007
Lam Research Corporation
Zhigang Mao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR IMPROVING CD MICRO-LOADING IN PHOTOMASK PLASMA ETCHING
Publication number
20160329210
Publication date
Nov 10, 2016
Applied Materials, Inc.
Zhigang MAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR IMPROVING CD MICRO-LOADING IN PHOTOMASK PLASMA ETCHING
Publication number
20140273490
Publication date
Sep 18, 2014
Applied Materials, Inc.
Zhigang MAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR IN-SITU CHAMBER DRY CLEAN IN PHOTOMASK PLASMA ETCHING P...
Publication number
20130048606
Publication date
Feb 28, 2013
Zhigang Mao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR IN-SITU CHAMBER DRY CLEAN DURING PHOTOMAS...
Publication number
20090325387
Publication date
Dec 31, 2009
APPLIED MATERIALS, INC.
Xiaoyi Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY