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last 30 patents
Information
Patent Grant
Vacuumizing device and vacuumizing method for bonding substrate
Patent number
11,664,228
Issue date
May 30, 2023
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Yuangen Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for bonding alignment
Patent number
11,152,230
Issue date
Oct 19, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Zhi Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Machine vision system for substrate alignment and alignment device
Patent number
10,985,044
Issue date
Apr 20, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Zhi Zhu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
VACUUMIZING DEVICE AND VACUUMIZING METHOD
Publication number
20200168459
Publication date
May 28, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Yuangen YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MACHINE VISION SYSTEM FOR SUBSTRATE ALIGNMENT AND ALIGNMENT D...
Publication number
20200090971
Publication date
Mar 19, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO.,LTD.
Zhi ZHU
G02 - OPTICS
Information
Patent Application
DEVICE AND METHOD FOR BONDING ALIGNMENT
Publication number
20200090962
Publication date
Mar 19, 2020
Zhi ZHU
H01 - BASIC ELECTRIC ELEMENTS