Zhili ZUO

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Detection of surface particles on chamber components with carbon di...
- Patent number 12,169,163
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Changgong Wang
- G01 - MEASURING TESTING
Information Patent Grant
Detection of surface particles on chamber components with carbon di...
- Patent number 11,815,436
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Changgong Wang
- G01 - MEASURING TESTING
Information Patent Grant
Detection of surface particles on chamber components with carbon di...
- Patent number 11,441,974
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Changgong Wang
- G01 - MEASURING TESTING
Information Patent Grant
RPS defect reduction by cyclic clean induced RPS cooling
- Patent number 10,755,903
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Sidharth Bhatia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...
- Publication number 20240060860
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- ChangGong Wang
- G01 - MEASURING TESTING
Information Patent Application
DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...
- Publication number 20220381653
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- ChangGong Wang
- G01 - MEASURING TESTING
Information Patent Application
DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...
- Publication number 20210033499
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- ChangGong Wang
- G01 - MEASURING TESTING
Information Patent Application
RPS DEFECT REDUCTION BY CYCLIC CLEAN INDUCED RPS COOLING
- Publication number 20170207069
- Publication date Jul 20, 2017
- Applied Materials, Inc.
- Sidharth BHATIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...