ZhiLin HUANG

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Device of changing gas flow pattern and a wafer processing method a...
- Patent number 10,529,577
- Issue date Jan 7, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- TuQiang Ni
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE OF CHANGING GAS FLOW PATTERN AND A WAFER PROCESSING METHOD A...
- Publication number 20160172204
- Publication date Jun 16, 2016
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- TuQiang NI
- H01 - BASIC ELECTRIC ELEMENTS