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Zhiqiang GUO
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Tunable temperature controlled substrate support assembly
Patent number
12,009,244
Issue date
Jun 11, 2024
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement for substrate carrier using a heater elemen...
Patent number
11,929,241
Issue date
Mar 12, 2024
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diagnostic disc with a high vacuum and temperature tolerant power s...
Patent number
11,924,972
Issue date
Mar 5, 2024
Applied Materials, Inc.
Phillip A. Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enclosure system with charging assembly
Patent number
11,817,724
Issue date
Nov 14, 2023
Applied Materials, Inc.
Phillip Alfred Criminale
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Diagnostic disc with a high vacuum and temperature tolerant power s...
Patent number
11,589,474
Issue date
Feb 21, 2023
Applied Materials, Inc.
Phillip A. Criminale
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature tunable multi-zone electrostatic chuck
Patent number
11,367,645
Issue date
Jun 21, 2022
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement for substrate carrier using a heater elemen...
Patent number
11,361,948
Issue date
Jun 14, 2022
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlled substrate support assembly
Patent number
11,158,526
Issue date
Oct 26, 2021
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with variable pixelated magnetic field
Patent number
10,790,180
Issue date
Sep 29, 2020
Applied Materials, Inc.
Chih-Hsun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tunable temperature controlled substrate support assembly
Patent number
10,535,544
Issue date
Jan 14, 2020
Applied Materials, Inc.
Vijay D. Parkhe
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck with variable pixelated magnetic field
Patent number
10,460,968
Issue date
Oct 29, 2019
Applied Materials, Inc.
Chih-Hsun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement for substrate carrier using a heater elemen...
Patent number
10,366,867
Issue date
Jul 30, 2019
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tunable temperature controlled substrate support assembly
Patent number
9,472,435
Issue date
Oct 18, 2016
Applied Materials, Inc.
Vijay D. Parkhe
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20240321620
Publication date
Sep 26, 2024
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...
Publication number
20240023246
Publication date
Jan 18, 2024
Applied Materials, Inc.
Phillip A. Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENCLOSURE SYSTEM WITH CHARGING ASSEMBLY
Publication number
20240022083
Publication date
Jan 18, 2024
Applied Materials, Inc.
Phillip Alfred Criminale
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...
Publication number
20230413446
Publication date
Dec 21, 2023
Applied Materials, Inc.
Phillip A. Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENCLOSURE SYSTEM WITH CHARGING ASSEMBLY
Publication number
20230283086
Publication date
Sep 7, 2023
Applied Materials, Inc.
Phillip Alfred Criminale
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...
Publication number
20230199992
Publication date
Jun 22, 2023
Applied Materials, Inc.
Phillip A. Criminale
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TEMPERATURE TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK
Publication number
20220277982
Publication date
Sep 1, 2022
Applied Materials, Inc.
Phillip CRIMINALE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE MEASUREMENT FOR SUBSTRATE CARRIER USING A HEATER ELEMEN...
Publication number
20220262605
Publication date
Aug 18, 2022
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20220013374
Publication date
Jan 13, 2022
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...
Publication number
20210378100
Publication date
Dec 2, 2021
Applied Materials, Inc.
Phillip A. Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...
Publication number
20210378119
Publication date
Dec 2, 2021
Applied Materials, Inc.
Phillip A. Criminale
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE CARRIER WITH ARRAY OF INDEPENDENTLY CONTROLLABLE HEATER E...
Publication number
20210335631
Publication date
Oct 28, 2021
Applied Materials, Inc.
Steven E. Babayan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK
Publication number
20200294836
Publication date
Sep 17, 2020
Applied Materials, Inc.
Phillip CRIMINALE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20200152500
Publication date
May 14, 2020
Applied Materials, Inc.
Vijay D. PARKHE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD
Publication number
20200013661
Publication date
Jan 9, 2020
Applied Materials, Inc.
Chih-Hsun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE MEASUREMENT FOR SUBSTRATE CARRIER USING A HEATER ELEMEN...
Publication number
20190295824
Publication date
Sep 26, 2019
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE MEASUREMENT FOR SUBSTRATE CARRIER USING A HEATER ELEMEN...
Publication number
20180053636
Publication date
Feb 22, 2018
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CARRIER WITH ARRAY OF INDEPENDENTLY CONTROLLABLE HEATER E...
Publication number
20180053666
Publication date
Feb 22, 2018
Applied Materials, Inc.
Steven E. Babayan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20160329231
Publication date
Nov 10, 2016
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20160027678
Publication date
Jan 28, 2016
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIXILATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Publication number
20150228513
Publication date
Aug 13, 2015
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD
Publication number
20150155193
Publication date
Jun 4, 2015
Chih-Hsun Hsu
H01 - BASIC ELECTRIC ELEMENTS