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Zhiwen Sun
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Methodologies to reduce process sensitivity to the chamber condition
Patent number
6,808,647
Issue date
Oct 26, 2004
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Process chamber having a voltage distribution electrode
Patent number
6,447,637
Issue date
Sep 10, 2002
Applied Materials Inc.
Valentin N. Todorov
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Process chamber having a voltage distribution electrode
Publication number
20030006009
Publication date
Jan 9, 2003
APPLIED MATERIALS, INC.
Valentin N. Todorov
H01 - BASIC ELECTRIC ELEMENTS