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Zhiyong Yang

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  • Shanghai, CN
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    VERTICAL CONTROL METHOD FOR USE IN LITHOGRAPHY MACHINE
    • Publication number 20200272062
    • Publication date Aug 27, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Dan CHEN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PHOTOETCHING APPARATUS AND METHOD
    • Publication number 20200257207
    • Publication date Aug 13, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Chang ZHOU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    OPTICAL MEASUREMENT DEVICE AND METHOD
    • Publication number 20190235396
    • Publication date Aug 1, 2019
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Zhiyong YANG
    • G01 - MEASURING TESTING
  • Information Patent Application

    OPTICAL MEASUREMENT DEVICE AND METHOD
    • Publication number 20190226831
    • Publication date Jul 25, 2019
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yuzhi LI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    EXPOSURE APPARATUS AND METHOD
    • Publication number 20180203358
    • Publication date Jul 19, 2018
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Renbiao XIE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    IMMERSION FLOW FIELD MAINTENANCE SYSTEM FOR AN IMMERSION LITHOGRAPH...
    • Publication number 20090273765
    • Publication date Nov 5, 2009
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
    • Zhiyong Yang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PRECISE POSITIONING SYSTEM FOR DUAL STAGE SWITCHING EXPOSURE
    • Publication number 20090219503
    • Publication date Sep 3, 2009
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
    • Yingsheng Li
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY