Zhiyu Pan

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Tri-axis accelerometer having a single proof mass and fully differe...
- Patent number 9,003,885
- Issue date Apr 14, 2015
- Robert Bosch GmbH
- Zhiyu Pan
- G01 - MEASURING TESTING
Information Patent Grant
Tri-axis accelerometer having a single proof mass and fully differe...
- Patent number 8,418,559
- Issue date Apr 16, 2013
- Robert Bosch GmbH
- Zhiyu Pan
- G01 - MEASURING TESTING
Information Patent Grant
MEMS resonator array structure and method of operating and using same
- Patent number 8,324,986
- Issue date Dec 4, 2012
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator structure including regions with different densities...
- Patent number 8,222,974
- Issue date Jul 17, 2012
- Robert Bosch GmbH
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator array structure and method of operating and using same
- Patent number 7,907,035
- Issue date Mar 15, 2011
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator structure and method
- Patent number 7,777,596
- Issue date Aug 17, 2010
- Robert Bosch GmbH
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tri-axis accelerometer having a single proof mass and fully differe...
- Patent number 7,757,555
- Issue date Jul 20, 2010
- Robert Bosch GmbH
- Zhiyu Pan
- G01 - MEASURING TESTING
Information Patent Grant
Microelectromechanical devices and fabrication methods
- Patent number 7,671,515
- Issue date Mar 2, 2010
- Robert Bosch, GmbH
- Matthias Metz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator array structure
- Patent number 7,595,708
- Issue date Sep 29, 2009
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Dual-axis yaw rate sensing unit having a tuning fork gyroscope arra...
- Patent number 7,401,517
- Issue date Jul 22, 2008
- Robert Bosch GmbH
- Zhiyu Pan
- G01 - MEASURING TESTING
Information Patent Grant
Micro-mechanical beam protective support structures wherein at leas...
- Patent number 7,342,703
- Issue date Mar 11, 2008
- Robert Bosch GmbH
- Andreas Niendorf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Breath-mode ring resonator structure, and method of designing, oper...
- Patent number 7,323,952
- Issue date Jan 29, 2008
- Robert Bosch GmbH
- Zhiyu Pan
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
In-plane mechanically coupled microelectromechanical tuning fork re...
- Patent number 7,319,372
- Issue date Jan 15, 2008
- Board of Trustees of the Leland Standford Junior University
- Zhiyu Pan
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator array structure and method of operating and using same
- Patent number 7,227,432
- Issue date Jun 5, 2007
- Robert Bosch GmbH
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Apparatus, method and system for providing enhanced mechanical prot...
- Patent number 7,177,068
- Issue date Feb 13, 2007
- Robert Bosch GmbH
- Andreas Niendorf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating microstructures and devices made therefrom
- Patent number 7,026,184
- Issue date Apr 11, 2006
- Carnegie Mellon University
- Huikai Xie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Differential in-plane tunneling current sensor
- Patent number 6,901,800
- Issue date Jun 7, 2005
- Robert Bosch GmbH
- Andreas Niendorf
- G01 - MEASURING TESTING
Information Patent Grant
Differential in-plane tunneling current sensor
- Patent number 6,895,818
- Issue date May 24, 2005
- Robert Bosch GmbH
- Andreas Niendorf
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for electrostatically levitating a disk and metho...
- Patent number 6,856,067
- Issue date Feb 15, 2005
- Robert Bosch GmbH
- Wilhelm Frey
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERE...
- Publication number 20140102194
- Publication date Apr 17, 2014
- Robert Bosch GmbH
- Zhiyu PAN
- G01 - MEASURING TESTING
Information Patent Application
MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME
- Publication number 20110199167
- Publication date Aug 18, 2011
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS RESONATOR STRUCTURE AND METHOD
- Publication number 20110018655
- Publication date Jan 27, 2011
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERE...
- Publication number 20100263447
- Publication date Oct 21, 2010
- Zhiyu Pan
- G01 - MEASURING TESTING
Information Patent Application
MEMS resonator array structure and method of operating and using same
- Publication number 20090153258
- Publication date Jun 18, 2009
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS resonator structure and method
- Publication number 20090153267
- Publication date Jun 18, 2009
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS resonator array structure and method of operating and using same
- Publication number 20080218295
- Publication date Sep 11, 2008
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Apparatus, method and system for providing enhanced mechanical prot...
- Publication number 20080180821
- Publication date Jul 31, 2008
- Andreas Niendorf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical devices and fabrication methods
- Publication number 20080122020
- Publication date May 29, 2008
- Robert Bosch GmbH.
- Matthias Metz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Tri-axis accelerometer having a single proof mass and fully differe...
- Publication number 20080053228
- Publication date Mar 6, 2008
- Zhiyu Pan
- G01 - MEASURING TESTING
Information Patent Application
Dual-axis yaw rate sensing unit having a tuning fork gyroscope arra...
- Publication number 20080041155
- Publication date Feb 21, 2008
- Zhiyu Pan
- G01 - MEASURING TESTING
Information Patent Application
Apparatus, method and system for providing enhanced mechanical prot...
- Publication number 20070121229
- Publication date May 31, 2007
- Andreas Niendorf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Breath-mode ring resonator structure, and method of designing, oper...
- Publication number 20070052498
- Publication date Mar 8, 2007
- Zhiyu Pan
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
In-plane mechanically coupled microelectromechanical tuning fork re...
- Publication number 20070013464
- Publication date Jan 18, 2007
- Zhiyu Pan
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS resonator array structure and method of operating and using same
- Publication number 20070001783
- Publication date Jan 4, 2007
- Markus Lutz
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Differential in-plane tunneling current sensor
- Publication number 20050035289
- Publication date Feb 17, 2005
- Andreas Niendorf
- G01 - MEASURING TESTING
Information Patent Application
Integrated monolithic tri-axial micromachined accelerometer
- Publication number 20040231420
- Publication date Nov 25, 2004
- Huikai Xie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of fabricating microstructures and devices made therefrom
- Publication number 20040166688
- Publication date Aug 26, 2004
- Huikai Xie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device and method for electrostatically levitating a disk and metho...
- Publication number 20040163471
- Publication date Aug 26, 2004
- Wilhelm Frey
- G01 - MEASURING TESTING
Information Patent Application
Arrangement, method, and system to reduce the play of micro-mechani...
- Publication number 20040118241
- Publication date Jun 24, 2004
- Andreas Niendorf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus, method and system for providing enhanced mechanical prot...
- Publication number 20040120057
- Publication date Jun 24, 2004
- Andreas Niendorf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Differential in-plane tunneling current sensor
- Publication number 20040118207
- Publication date Jun 24, 2004
- Andreas Niendorf
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Tri-axis accelerometer having a single proof mass and fully differe...

Tri-axis accelerometer having a single proof mass and fully differe...

MEMS resonator array structure and method of operating and using same

MEMS resonator structure including regions with different densities...

MEMS resonator array structure and method of operating and using same

MEMS resonator structure and method

Tri-axis accelerometer having a single proof mass and fully differe...

Microelectromechanical devices and fabrication methods

MEMS resonator array structure

Dual-axis yaw rate sensing unit having a tuning fork gyroscope arra...

Micro-mechanical beam protective support structures wherein at leas...

Breath-mode ring resonator structure, and method of designing, oper...

In-plane mechanically coupled microelectromechanical tuning fork re...

MEMS resonator array structure and method of operating and using same

Apparatus, method and system for providing enhanced mechanical prot...

Method of fabricating microstructures and devices made therefrom

Differential in-plane tunneling current sensor

Differential in-plane tunneling current sensor

Device and method for electrostatically levitating a disk and metho...

Patents Applicationslast 30 patents

TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERE...

MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME

MEMS RESONATOR STRUCTURE AND METHOD

TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERE...

MEMS resonator array structure and method of operating and using same

MEMS resonator structure and method

MEMS resonator array structure and method of operating and using same

Apparatus, method and system for providing enhanced mechanical prot...

Microelectromechanical devices and fabrication methods

Tri-axis accelerometer having a single proof mass and fully differe...

Dual-axis yaw rate sensing unit having a tuning fork gyroscope arra...

Apparatus, method and system for providing enhanced mechanical prot...

Breath-mode ring resonator structure, and method of designing, oper...

In-plane mechanically coupled microelectromechanical tuning fork re...

MEMS resonator array structure and method of operating and using same

Differential in-plane tunneling current sensor

Integrated monolithic tri-axial micromachined accelerometer

Method of fabricating microstructures and devices made therefrom

Device and method for electrostatically levitating a disk and metho...

Arrangement, method, and system to reduce the play of micro-mechani...

Apparatus, method and system for providing enhanced mechanical prot...

Differential in-plane tunneling current sensor