Zhongdu Liu

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Capacitive-coupled plasma processing apparatus and method for proce...
- Patent number 9,230,781
- Issue date Jan 5, 2016
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Zhongdu Liu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND METHOD FOR PROC...
- Publication number 20130062311
- Publication date Mar 14, 2013
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Zhongdu LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE-COUPLED PLASMA PROCESSING APPARATUS AND METHOD FOR PROCE...
- Publication number 20130032574
- Publication date Feb 7, 2013
- Zhongdu Liu
- H01 - BASIC ELECTRIC ELEMENTS