Zhonghua YAO

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Cryogenic atomic layer etch with noble gases
- Patent number 11,996,294
- Issue date May 28, 2024
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
In-situ deposition process
- Patent number 11,521,849
- Issue date Dec 6, 2022
- Applied Materials, Inc.
- Sang Wook Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cryogenic atomic layer etch with noble gases
- Patent number 11,515,166
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cryogenic atomic layer etch with noble gases
- Patent number 11,087,989
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SIDEWALL PASSIVATION FOR PLASMA ETCHING
- Publication number 20230245895
- Publication date Aug 3, 2023
- Applied Materials, Inc.
- Zhonghua Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES
- Publication number 20230071505
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Alvaro GARCIA DE GORORDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES
- Publication number 20210398815
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Alvaro GARCIA DE GORORDO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-SITU ATOMIC LAYER DEPOSITION PROCESS
- Publication number 20200373149
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Sang Wook PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU DEPOSITION PROCESS
- Publication number 20200027717
- Publication date Jan 23, 2020
- Applied Materials, Inc.
- Sang Wook PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...