Zhonghui Alex Wang

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Thermal methods for cleaning post-CMP wafers
- Patent number 7,884,017
- Issue date Feb 8, 2011
- Lam Research Corporation
- Zhonghui Alex Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal methods for cleaning post-CMP wafers
- Patent number 7,709,400
- Issue date May 4, 2010
- Lam Research Corporation
- Zhonghui Alex Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THERMAL METHODS FOR CLEANING POST-CMP WAFERS
- Publication number 20100136788
- Publication date Jun 3, 2010
- LAM RESEARCH CORPORATION
- Zhonghui Alex Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal methods for cleaning post-CMP wafers
- Publication number 20080280456
- Publication date Nov 13, 2008
- Lam Research Corporation
- Zhonghui Alex Wang
- H01 - BASIC ELECTRIC ELEMENTS